Failure Analysis of Issues Related to Etching

Date: 2-3 November 2017

Time: 9am - 5pm

Venue: sains@usm, Persiaran Bukit Jambul, Bayan Lepas, Penang.



Failure is unavoidable in any engineering products, depending on the level of seriousness and stage of the product life cycle. In order to minimize failure and improve of the quality and reliability of a product, analysis of failure is an important topic. This is a vast topic that encompasses of wide and diverse discipline of science and technology. In this training, common characterization techniques to be used to acquire information related to failure and issue of etching process will be the main focus. By having this information, subsequent analyses to find out the root cause(s) can be performed. Systematic failure analysis step will be explained. Importance of information-property relationship will be elaborated. Criteria and decision of selecting the most appropriate characterization tool to obtain the information will be taught in the training.  In order to achieve this objective, instrumentation, operational, application, and interpretation of commonly used characterization techniques will be covered.

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